Browsing UTSA Faculty and Staff Works by Author "Galindo, Arturo"

Now showing items 1-1 of 1

Comparative Study on the Quality of Microcrystalline and Epitaxial Silicon Films Produced by PECVD Using Identical SiF4 Based Process Conditions

Moreno, Mario; Ponce, Arturo; Galindo, Arturo; Ortega, Eduardo; Morales, Alfredo; Flores, Javier; Ambrosio, Roberto; Torres, Alfonso; Hernandez, Luis; Vazquez-Leal, Hector; Patriarche, Gilles; Cabarrocas, Pere Roca i (2021-11-17)

Hydrogenated microcrystalline silicon (µc-Si:H) and epitaxial silicon (epi-Si) films have been produced from SiF4, H2 and Ar mixtures by plasma enhanced chemical vapor deposition (PECVD) at 200 ◦C. Here, both films were ...