Analysis of multilayer structure of piezoelectric thin film by X-ray diffraction

Date
2015
Authors
Chowdhury, Fahad Abdullah
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract

Usage of Lead Zirconate Titanate (PZT) had been in headline due to its extensive application in developing sensor, actuator and Micro-Electro-Mechanical system (MEMS) devices. In this thesis work a multilayer PbZr0.52Ti 0.48O3 thin film grown by sol-gel deposition technique is used. Non-destructive X-ray diffraction analysis is used to characterize the structural properties of the PbZr0.52Ti0.48O3 multilayer thin film. The peak indexing of the & thgr;-2 & thgr; scan shows that the PZT film has (002) orientation. A sharp peak of Pt (111) is also found from the scan. The FWHM of PZT {200} and Pt {111} peak measured by rocking curve are 3.25° and 3.66° respectively. The peak splitting of PZT {200} in to (002) and (200/020) shows the tetragonal phase of PZT thin film which is congruent with the lattice parameter of PZT found by Le-Bail refinement. The Le-Bail refinement also shows good match between observed diffraction intensities and calculated intensities. X-ray Reflectivity measurement showed the sequence of Pt/STO/PZT on silicon substrate. The density of the PZT and the surface roughness of the PZT are found to be 6.08g/cm3 and 7Å derived from the best fitting of multilayer model based on XRR measurement.

Description
This item is available only to currently enrolled UTSA students, faculty or staff.
Keywords
Piezoelectric Material, Thin Film, X-ray Diffraction
Citation
Department
Electrical and Computer Engineering